Optical Characterization Group

Universitat de Barcelona


NKDGen (download)

This program simulates measurements of spectrophotometric and ellipsometric spectra. It is intended for illustrating the capability of NKD programs for managing different material models and types of measurement. For analyzing experimental data the NKDMatl and NKDStack programs have to be used.

The user defines the sample (substrate and layers) and the experimental measuring conditions (angle of incidence, range and units of the simulation). The features of the program are:

è Reflectance, transmittance and ellipsometric spectra

The program can generate many kinds of spectra, at any angle of incidence and polarization of the incident beam.

è Sample back side contribution

The program can take into account the contribution of the back side of the sample by considering a single reflection inside the substrate or multiple reflections.

è Variety of material models

Many models have been included for describing the spectral behavior of complex refractive index (for transparent materials, semiconductors, metals...), covering a wide range of applications:

è EMA models

Effective Medium Approximation (EMA) models for the description of layers with mixtures of materials are also implemented.

è Layer Inhomogeneity

In-depth inhomogeneity (of the refractive index n) within the layer can be modeled according to different shapes (linear profile, 2-line profile, segmented profile...).