Optical Characterization Group Universitat de Barcelona |
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Characterization
Programs
Three programs are presented here. NKDGen is a direct calculation program
while NKDMatl and NKDStack are for inverting spectorcopic data. NKDMatl and
NKDStack are intended for users involved in Researh and Development tasks,
to help in the optical analysis of their samples.
This program can be used to calculate optical spectra for a sample defined
by the user. It illustrates the variety of dispersion models for the refractive
index and extinction coefficient that are available within the NKD programs
as well as the different kinds of experimental spectra that can be analyzed
by NKDMatl and NKDStack.
This program has been developed for the analysis of materials deposited as
a single thin film. Many dispersion models for the refractive index and absorption coefficient are
implemented (for transparent materials, semiconductors, metals...).
In-depth
inhomogeneity, surface roughness, interface layers and bare substrate characterization
are included as well.
All these characteristics are fitted from the ellipsometric and/or
spectrophotometric data, together with the thickness,
refractive index and absorption coefficient.
This is a program for analysis of spectrophotometric and ellipsometric
spectra of samples with multilayer coatings. Thicknesses and dispersive complex refractive
indices can be fitted from the data.
For coatings with many layers, the characteristics of the component
materials can be linked between the layers, in order to reduce the number of parameters
and to obtain more meaningful results.
Several dispersive and EMA models can be used for the layer materials.
Besides, the program allows the simultaneous fitting of several
spectra from the same sample, as well as the fitting of several samples from the same
coating run.
These programs can manage unconventional characterization needs in the research
and manufacture of thin film products (fitting several spectra from a single sample,
fitting together the data of several samples...). |