Title: Room-temperature silicon platform for GHz-frequency nano-electro-opto-mechanical systems

Authors: D. Navarro-Urrios; M.F. Colombano; G. Arregui; G. Madiot; A. Pitanti; A. Griol; T. Makkonen; J. Ahopelto; C.M. Sotomayor-Torres; A. Martínez
Journal: ACS Photonics
Vol: 9
Number: 2
Start page: 413
Last page: 419
DOI: doi
Institutional repositories:
Year: 2022
Key: Article