| Source | wavelength: 13.56MHz | ||
|---|---|---|---|
| Power: Up to 600W | |||
| Target size | Targets of 3" | ||
| Substrates | Homogeneity over 10cm x 10 cm | ||
| Rotary substrate holder | |||
| Polarizable substrate | |||
| Working conditions | Vacuum system: 10-7Torr | Rotary pump | |
| Turbomolecular pump | |||
Temperatures between 20ºC and 800ºC |
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| Materials | Available gases: Ar, O2, N2 | ||
| Conductive Tramsparent oxides : ZnO, ITO, SnO | |||
| Metals: Ag, Al ... | |||
Belongs to: Solar Energy Group (GES)
Contact Person: Paz Carreras
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