IN²UB In-house Seminar
Nanostructured thin films deposited by plasma-assisted PVD techniques
By, Dr. Arturo Lousa, Applied Physics Dept. UB & IN2UB – MAMFER group
Date and Venue: 23rd October, 2025 at 12h, Aula Magna Enric Casassas (Faculties of Physics and Chemistry)
Abstract
The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices [1]. Over the last two decades’ new nanostructured coatings deposited by plasma-assisted PVD techniques have been investigated in our laboratory as they are a possible advantageous replacement for conventional coatings.
In this talk I will first introduce the physical basis of the PVD techniques of radiofrequency Magnetron Sputtering and Cathode Arc Deposition, with a particular emphasis on the control of ion bombardment from the plasma on the growing film. Next, I will present the most remarkable results of periodic multilayers in which two different materials (metal/ceramic and ceramic/ceramic) alternate with bilayer thickness ranging from the micro-scale (≈ 100 nm) to the nano-scale (≈ 5 nm). Finally, I will present the nanocomposite structures found in the Cr/C system deposited by filtered ion assisted Arc Deposition technique under different deposition conditions. These films show a wide range of Cr/C composition and film structure, which includes: Cr/CrC multilayers with nanometric period; nanocomposite consisting of nanocrystalline chromium embedded in an amorphous CrC matrix; nanocrystalline Cr3C2 embedded in an amorphous C matrix and a graded composition film from the substrate to the free surface of the film.
A deep characterization of the coatings has been carried out, both in terms of their physical, mechanical, tribological and biomedical properties. Among the most relevant results, it is worth highlighting the super-hardness values (up to 30 GPa) [2], the ultra-low friction [3], and the excellent adhesion to the CoCrMo alloy substrates used in human (knee, hip) prosthesis. [4].
[1] Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices. NATO Science Series E: Springer Dordrecht (2012)[2] Yate Gómez, L. Á. (Ph.D. 2013). Desarrollo de Nanocompuestos de Base Carbono en Capa Fina por Arco Catódico para Aplicaciones Mecánicas y Biomédicas. Universitat de Barcelona. https://www.tesisenred.net/handle/10803/123437
[3] L. Yate, L. Martínez-de-Olcoz, J. Esteve, A. Lousa, “Ultra low nanowear in novel chromium/amorphous chromium carbide nanocomposite films”. Applied Surface Science 420 pp.707–713 October 2017.
[4] J. Orrit-Prat, R. Bonet, E. Rupérez, M. Punset, M. Ortiz-Hernandez , J. Guillem-Marti, A. Lousa, D. Cano, C. Díaz, G. García-Fuentes, J. Caro, “Bactericidal silver-doped DLC coatings obtained by pulsed filtered cathodic arc co-deposition”, Surface & Coatings Technology 411 (2021) 126977.
About the Author
Arturo Lousa Rodríguez is Professor (Profesor Titular de Universidad) in the Department of Applied Physics of the Universitat de Barcelona.
Education
1973-1978 B.Sc. (Licenciatura) (Physics), University of Barcelona, Barcelona, (SPAIN)
1987 Ph.D. (Physics), University of Barcelona, Barcelona, (SPAIN)
Employment
1980 – 1987: Assistant Professor, University of Barcelona, Barcelona, (SPAIN)
1987 – 2026: Professor, University of Barcelona, Barcelona, (SPAIN)
Membership of Professional Societies
Member of the Spanish Association of Vacuum and Applications (ASEVA).
Member, Spanish Society of Materials (SOCIEMAT).
Member and Delegate of International Union for Vacuum Science (IUVS). Electronic Materials and Processing.
Publications
70 total, Total citations received (Without self citations): > 1000, Hirsch index: 23
Arturo Lousa was one of the young researchers who, around 1980, contributed to the launch of the Thin Film Laboratory at the University of Barcelona under the direction of Drs. Josép Lluis Morenza and Joan Esteve. His teaching work has focused on all levels of electromagnetism. His research initially involved the PVD techniques of thermal evaporation and electron gun evaporation, later focusing on radiofrequency magnetron sputtering and filtered cathode arc techniques, with important original designs for controlling ion bombardment from the plasma onto the growing film. Among the deposited materials, the production of pure crystalline phases of cubic BN, Cr3C2, and Cr2N stands out. In addition, various nanometer-period multilayers were obtained for magnetic, optical, and mechanical applications. Several of these contributions have led to technology transfer to coatings companies in Catalonia, Valencia and the Basque Country.