SUSS MicroTec Delta 6RC Spin coater & Hot Plates |
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| Spin coater | 10 programmable steps | |
| Sample size: up to 6" wafers | ||
| ramps from 0.5s to 5s | ||
| Hot plates | Two covered independent hotplates | |
| Temperatures up to 300ºC | ||
| Time alarm | ||
Belongs to: Clean Room
| Contact Person: | Nasser Darwish |
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